Nanoscience and Technology

Nanolithography

The term nanolithography originate from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore, the literal meaning is tiny writing on rocks. Nanolithography is that the science of etching, writing or printing to modify a material surface with structures under 100nm. The purpose of nanolithography is that the shrinking of electronic devices, which allows for more electronics parts to be, crammed into smaller spaces, i.e., smaller integrated circuits that result in smaller devices, which are faster and cheaper to manufacture since less materials are required. This also increases performance and response times because the electrons only got to travel very short distances.

• Electron-Beam Direct Write (EBDW) lithography
• Extreme ultraviolet (EUV) lithography
• Light Coupling Nanolithography (LCM)
• Scanning probe microscope lithography (SPM)
• Nano imprint lithography